List of all MFGE courses

4 Credits

Lecture and lab

Graduate standing

Brian Paul
219 Dearborn Hall

Course Description

Introduction to microsystem platforms, scaling laws and size effects in micromanufacturing techniques with an emphasis on microchannel arrays, microchannel lamination and micro-scale characterization.


  • Micro-scale Products
  • Microsystem Platforms
  • Scaling Laws
  • Micromanufacturing Techniques
  • Micromachining
  • Microforming
  • Photochemical Machining
  • Laser Machining and Welding
  • Diffusion Bonding/Diffusion Brazing
  • Brazing
  • Metrology and Characterization
  • Geometric Dimensioning and Tolerancing
  • Shape Variation in Micromanufacturing
  • Lamina Metrology
  • Microchannel Device Characterization
  • Process Design
  • Tool Design

Learning Outcomes

The student, upon completion of this course, will be able to:

1.            Distinguish various miniaturization technologies and microsystem platforms.

2.            Demonstrate the advantages of microchannel scaling laws through analysis.

3.            Document the design of a microchannel array.

4.            Describe the geometric attributes of importance at both a lamina and device-level and how to characterize these attributes.

5.            Determine appropriate material and processing techniques and conditions needed to reliably manufacture a microchannel device.

6.            Describe potential defects for various micromanufacturing processes.

7.            Develop a tool design for a micromanufacturing process step.

8.            Develop a cost estimate for a device based on cycle time, equipment, utility and material estimates for various processes.