Nano/Micro Fabrication

Nano/Micro Fabrication (NMF) comprises the integration of nanomaterial synthesis techniques and silicon and non-silicon microfabrication techniques with more conventional macro-scale manufacturing technologies for the purposes of enhanced system performance and economics. In a broader sense, NMF involves the development of the materials, processes and metrology necessary to economically produce hierarchical systems. This area is in support of the interdisciplinary Center for Micro Energy and Chemical Systems (MECS – see http://mecs.oregonstate.edu/), the Microproducts Breakthrough Institute (MBI – see http://www.pnl.gov/microproducts/) and the Oregon Nanoscience and Microtechnologies Institute (ONAMI – see http://www.onami.us/) at OSU. The NMF concentration area is based in IME but uses courses and laboratories from across the College of Engineering currently existing under the umbrella of the Center for MECS and ONAMI and elsewhere.

Graduate studies in NMF cover Multi-Scale Systems Development and Fabrication Science.

• Multi-Scale Systems Development (MSSD). MECS devices are bulk microfluidic systems which rely on embedded micro and nano-features to enhance heat and mass transfer for miniaturizing and improving control within energy, chemical and biomedical systems. Many times in the development of these systems, novel processing methods must be innovated. MECS devices are generally developed using laminate (patterning, registration and bonding of thin sheets of material) and particulate (powder) processing platforms. Examples of process development efforts include powder injection molding, microlamination based on surface mount technology and large-substrate thermal bonding based on differential thermal expansion. Examples of devices developed include microchannel heat pumps, cytosensors, fuel processors, biodiesel microreactors and nanofactories.
  
  
• Fabrication Science (FabS). Eventually, effective process development requires an understanding of the physical and chemical phenomena underlying the various miniaturization processes. As more is understood about fabrication processes, manufacturability rules can be established and computer-aided manufacturing engineering tools can be developed. Examples of analysis and modeling studies include effects of powder/binder systems on flow and compaction behavior in injection molds, effects of microreactor design on nanomaterial synthesis, and effects of bonding methods on microchannel pressure drop.

Our MSF graduate faculty are:

• Sundar Atre, IME (MSSD, FabS)
• Chih-hung “Alex” Chang, Chemical Engineering (MSSD, FabS)
• Shiwoo Lee, IME (MSSD)
• Brian Paul, IME (MSSD, FabS)
• Tom Plant, Electrical and Computer Engineering (MSSD)
• Vince Remcho, Chemistry (MSSD)
• John Simonsen, Wood Science (FabS)
• Bill Warnes, Mechanical Engineering (FabS)