IE 532
MICROFABRICATION TECHNOLOGY

Course Description

Survey of microfabrication processing techniques, including bulk, surface, and mold micromachining and application of this technology to microelectromechanical systems (MEMS). Some review of semiconductor integrated circuit processing.

Topics

• Introduction to MEMS
• Photolithography
• Dry etching
• Thin film deposition
• Bulk micromachining
• Surface micromachining
• LIGA/Mold micromachining
• MEMS packaging

Learning Outcomes

The student, upon completion of this course, will be able to:

• Contrast and compare the various materials used in MEMS devices.
• Contrast and compare the various micromachining techniques used in MEMS devices in terms of conformality, selectivity, anisotropy and various other criteria.
• State the effect of various processing steps on the properties of various materials.
• Articulate the compatibility of various microfabrication processing steps with one another.
• Develop a CAD representation of a simple micromachined structure using standard MEMS processing steps.
• Critically review microfabrication literature and identify opportunities for future research.